Semiconductor industry gas analyser
This analyser measures impurities in bulk gases used in the semiconductor industry. These gases are often highly reactive, placing special demands on the analyser’s design and materials. At GAS, we offer easy-to-use, fully automated biogas analysers, backed by over 40 years of expertise in high-quality analytical equipment.
Semiconductor industry gas analyser
Features
- Low ppb level limit of detection in bulk gases
- Reliable performance in harsh media gases
- Low maintenance costs; modular iConnect injector/detector concept
Documents
Our semiconductor industry gas analyser can handle harsh bulk gases
Bulk gases are essential in the semiconductor industry, supporting key processes such as deposition, etching, oxidation, purging, and cooling. Common examples include permanent gases, ammonia, hydrogen chloride, hydrogen bromide and chlorine. Each gas serves specific functions – from maintaining inert atmospheres to enabling precise chemical reactions during wafer fabrication. Gas purity is critical, as even trace contaminants can cause defects or yield losses at the nanometre scale. To ensure process stability and device reliability, semiconductor manufacturing requires ultra-high-purity gases (often N6/6.0 or higher). The GAS semiconductor gas analyser measures the impurities at low ppb level.
Contact us for more details about our products
GAS is the unique branding Interscience uses for its custom GC systems for the petroleum, petrochemical, natural gas and energy market. It’s based upon close cooperation with Thermo Scientific, acting as its preferred solution partner in this field. If you have any questions about us or our products and services, please contact us.
GAS – GC & GC-MS Solutions for Energy, Refinery, Chemical and Environmental markets