Semiconductor Industry Gas Analyser
High sensitivity GC solution for impurity analysis in aggressive bulk gases, delivering reliable ppb level detection for semiconductor manufacturing.
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Ultra-Trace Gas Analysis for Semiconductor Manufacturing
Bulk gases play a critical role in semiconductor manufacturing processes such as deposition, etching, oxidation and purging. The purity of these gases directly impacts product quality, yield and process stability. Even trace level contaminants can lead to defects at nanometre scale, making highly sensitive and reliable gas analysis essential.
The GAS Semiconductor Industry Gas Analyser is specifically designed for impurity analysis in aggressive bulk gases such as HCl, HBr, BCl3, Cl2, NH3, CF4, NF3, N2O and dichlorosilane. Based on proven gas chromatography technology with Pulsed Discharge Detection, the system delivers low ppb level detection while ensuring robust operation in harsh chemical environments. Specially designed valves, passivated sample paths and purge functionality guarantee long term stability and reliable performance.
Applications
- Bulk Gas Purity Control
Analyse impurities in process gases used for semiconductor fabrication. - Etching and Deposition Processes
Monitor gas quality in critical processes involving reactive and corrosive gases. - Ultra High Purity Gas Verification
Ensure gas quality at N6 and higher purity levels to prevent yield loss. - Semiconductor Manufacturing Facilities
Support stable operation of wafer fabrication processes with reliable gas analysis. - Process Development and R&D
Enable accurate impurity analysis for development of advanced semiconductor processes.
Benefits
- Low ppb Detection Limits
Detect impurities below 20 ppb for reliable quality control of bulk gases. - Robust Design for Aggressive Gases
Built to handle corrosive and reactive gas streams with passivated components. - High Repeatability
Excellent repeatability below 1 percent ensures consistent analytical results. - Fast Analysis Time
Typical runtime of approximately 5.5 minutes for efficient process monitoring. - Low Maintenance Operation
Modular injector and detector concept enables easy servicing and high uptime.
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Semiconductor Industry Gas Analyser Datasheet
This datasheet describes a GC-based solution for impurity analysis in aggressive bulk gases used in semiconductor manufacturing. It covers analyser configuration, detection limits and system design for reliable ppb level gas analysis.