Silane purity analyser
GAS recently installed a Silane purity analyser. Silane – SiH4 – is used in the semiconductor industry, in production of glass fibers and coatings, and has an important rol in polymer production. The measured impurities are permanent gases like H2, O2, N2, CH4, CO and CO2 at low ppb levels. SiH4 is extreme flammable, therefore special care is taken in handling the matrix peak. Please contact us for more information.
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